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Intelligent Sensing and Precision Metrology

  • Research priority
    • Institution Technische Universität Ilmenau
    • Search research priority Intelligent Sensing and Precision Metrology
    • Short description This profile line comprises the holistic research of nanopositioning and nanometrology, nanofabrication, intelligent process measurement technology, image processing and Lorentz force velocimetry.
  • Discipline
    • Research area(s) Informatics, System and Electrical Engineering; Materials Science and Engineering; Mechanical and Industrial Engineering; Physics
    • Key term(s) smart sensor technology; sensor networks; interferometry; production technology; mechatronics
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